Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements - researchr publication authors

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Stanislaw Kalicinski, Tomasz Bieniek, Pawel Janus, Piotr Grabiec. Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements. Microelectronics Reliability, 51(7):1192-1197, 2011. [doi]

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