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Interface State Density between Direct Nitridation Layer and SiC Estimated from Current Voltage Characteristics of MIS Schottky Diode

Kiichi Kamimura, Hiroaki Shiozawa, Tomohiko Yamakami, Rinpei Hayashibe. Interface State Density between Direct Nitridation Layer and SiC Estimated from Current Voltage Characteristics of MIS Schottky Diode. IEICE Transactions, 92-C(12):1470-1474, 2009. [doi]

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