The following publications are possibly variants of this publication:
- Virtual Metrology Technique for Semiconductor ManufacturingYaw-Jen Chang, Yuan Kang, Chin-Liang Hsu, Chi-Tim Chang, Tat Yan Chan. ijcnn 2006: 5289-5293 [doi]
- A virtual metrology system for semiconductor manufacturingPilsung Kang, Hyoungjoo Lee, Sungzoon Cho, Dongil Kim, Jinwoo Park, Chan-Kyoo Park, Seungyong Doh. eswa, 36(10):12554-12561, 2009. [doi]