Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

Pin-Hsu Kao, Po-Jen Shih, Ching-Liang Dai, Mao-Chen Liu. Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators. Sensors, 10(2):1315-1325, 2010. [doi]

@article{KaoSDL10,
  title = {Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators},
  author = {Pin-Hsu Kao and Po-Jen Shih and Ching-Liang Dai and Mao-Chen Liu},
  year = {2010},
  doi = {10.3390/s100201315},
  url = {http://dx.doi.org/10.3390/s100201315},
  researchr = {https://researchr.org/publication/KaoSDL10},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {10},
  number = {2},
  pages = {1315-1325},
}