Simulation and Experimentation of a MEMS Electrostatic Field Sensor with a Virtual Ground

Joel Kaskiw, Tao Chen, Cyrus Shafai. Simulation and Experimentation of a MEMS Electrostatic Field Sensor with a Virtual Ground. In IEEE Canadian Conference on Electrical and Computer Engineering, CCECE 2025, Vancouver, BC, Canada, May 26-29, 2025. pages 406-410, IEEE, 2025. [doi]

Authors

Joel Kaskiw

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Tao Chen

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Cyrus Shafai

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