Karl G. Kempf. Simulating Semiconductor Manufacturing Systems: Successes, Failures, and Deep Questions. In Winter Simulation Conference. pages 3-11, 1996. [doi]
@inproceedings{Kempf96:1,
title = {Simulating Semiconductor Manufacturing Systems: Successes, Failures, and Deep Questions},
author = {Karl G. Kempf},
year = {1996},
doi = {10.1145/256562.256565},
url = {http://doi.acm.org/10.1145/256562.256565},
researchr = {https://researchr.org/publication/Kempf96%3A1},
cites = {0},
citedby = {0},
pages = {3-11},
booktitle = {Winter Simulation Conference},
}