Microcrystalline silicon gauges on flexible substrates for high deformations with high spatial resolution - researchr publication authors

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Y. Kervran, S. Janfaoui, O. de Sagazan, Samuel Crand, N. Coulon, J. P. Gauthier, Taieb Mohammed-Brahim. Microcrystalline silicon gauges on flexible substrates for high deformations with high spatial resolution. In Seventh International Conference on Sensing Technology, ICST 2013, Wellington, New Zealand, December 3-5, 2013. pages 603-607, IEEE, 2013. [doi]

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