Study of GHz-SAM sensitivity to delamination in BEOL layers

A. Khaled, Luka Kljucar, S. Brand, M. Kögel, R. Aertgeerts, R. Nicasy, Ingrid De Wolf. Study of GHz-SAM sensitivity to delamination in BEOL layers. Microelectronics Reliability, 76:238-242, 2017. [doi]

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