Recent advances in MEMS sensor technology-mechanical applications

Farbod Khoshnoud, Clarence W. de Silva. Recent advances in MEMS sensor technology-mechanical applications. IEEE Instrum. Meas. Mag., 15(2):14-24, 2012. [doi]

@article{KhoshnoudS12a,
  title = {Recent advances in MEMS sensor technology-mechanical applications},
  author = {Farbod Khoshnoud and Clarence W. de Silva},
  year = {2012},
  doi = {10.1109/MIM.2012.6174574},
  url = {http://dx.doi.org/10.1109/MIM.2012.6174574},
  researchr = {https://researchr.org/publication/KhoshnoudS12a},
  cites = {0},
  citedby = {0},
  journal = {IEEE Instrum. Meas. Mag.},
  volume = {15},
  number = {2},
  pages = {14-24},
}