Chulhan Kim, Tae-Eog Lee. Feedback Control of Cluster Tools for Regulating Wafer Delays. IEEE T. Automation Science and Engineering, 13(2):1189-1199, 2016. [doi]
@article{KimL16-8,
title = {Feedback Control of Cluster Tools for Regulating Wafer Delays},
author = {Chulhan Kim and Tae-Eog Lee},
year = {2016},
doi = {10.1109/TASE.2015.2404921},
url = {http://dx.doi.org/10.1109/TASE.2015.2404921},
researchr = {https://researchr.org/publication/KimL16-8},
cites = {0},
citedby = {0},
journal = {IEEE T. Automation Science and Engineering},
volume = {13},
number = {2},
pages = {1189-1199},
}