Real-time feedback control of reactive ion etching using neural networks

T. Kim, D. Stokes, Gary May. Real-time feedback control of reactive ion etching using neural networks. In Proceedings of International Conference on Neural Networks (ICNN'96), Washington, DC, USA, June 3-6, 1996. pages 2039-2043, IEEE, 1996. [doi]

Authors

T. Kim

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D. Stokes

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Gary May

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