Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach - researchr publication authors

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Jakob Kinghorst, Omid Geramifard, Ming Luo, Hian Leng Chan, Khoo Yong, Jens Folmer, Minjie Zou, Birgit Vogel-Heuser. Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 1260-1267, IEEE, 2017. [doi]

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