Cantilever-Based Biosensors in CMOS Technology

Kay-Uwe Kirstein, Yue Li, Martin Zimmermann, Cyril Vancura, Tormod Volden, Wan Ho Song, Jan Lichtenberg, Andreas Hierlemann. Cantilever-Based Biosensors in CMOS Technology. In 2005 Design, Automation and Test in Europe Conference and Exposition (DATE 2005), 7-11 March 2005, Munich, Germany. pages 1340-1341, IEEE Computer Society, 2005. [doi]

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