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Spectroscopic Measurement of Material Properties Using an Improved Millimeter-Wave Ellipsometer Based on Metallic Substrates

Mathias Klenner, Christian Zech, Axel Hülsmann, Jutta Kuhn, Michael Schlechtweg, Oliver Ambacher. Spectroscopic Measurement of Material Properties Using an Improved Millimeter-Wave Ellipsometer Based on Metallic Substrates. IEEE T. Instrumentation and Measurement, 65(11):2551-2559, 2016. [doi]

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Mathias Klenner

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Christian Zech

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Axel Hülsmann

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Jutta Kuhn

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Michael Schlechtweg

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Oliver Ambacher

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