On the strain induced by arsenic into silicon

Stephane Koffel, Peter Pichler, Jürgen Lorenz, Gabriele Bisognin, Enrico Napolitani, Davide De Salvador. On the strain induced by arsenic into silicon. In Proceedings of the European Solid-State Device Research Conference, ESSDERC 2013, Bucharest, Romania, September 16-20, 2013. pages 206-209, IEEE, 2013. [doi]

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