Thermal stress analysis of die stacks with fine-pitch IMC interconnections for 3D integration

Sayuri Kohara, Akihiro Horibe, Kuniaki Sueoka, Keiji Matsumoto, Fumiaki Yamada, Yasumitsu Orii, Katsuyuki Sakuma, Takahiro Kinoshita, Takashi Kawakami. Thermal stress analysis of die stacks with fine-pitch IMC interconnections for 3D integration. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-7, IEEE, 2011. [doi]

Authors

Sayuri Kohara

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Akihiro Horibe

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Kuniaki Sueoka

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Keiji Matsumoto

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Fumiaki Yamada

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Yasumitsu Orii

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Katsuyuki Sakuma

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Takahiro Kinoshita

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Takashi Kawakami

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