Matthias Koitzsch, Humbert Noll, Alexander Nemecek, Jochen Merhof, Markus Michl, Alfred Honold, Gerhard Kleineidam, Holger Lebrecht. Implementing virtual metrology into semiconductor production processes: an investment assessment. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 2022-2033, WSC, 2011. [doi]
@inproceedings{KoitzschNNMMHKL11,
title = {Implementing virtual metrology into semiconductor production processes: an investment assessment},
author = {Matthias Koitzsch and Humbert Noll and Alexander Nemecek and Jochen Merhof and Markus Michl and Alfred Honold and Gerhard Kleineidam and Holger Lebrecht},
year = {2011},
url = {http://dl.acm.org/citation.cfm?id=2431758},
researchr = {https://researchr.org/publication/KoitzschNNMMHKL11},
cites = {0},
citedby = {0},
pages = {2022-2033},
booktitle = {Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011},
editor = {S. Jain and Roy R. Creasey Jr. and Jan Himmelspach and K. Preston White and Michael C. Fu},
publisher = {WSC},
}