Spectral performance of a micromachined infrared spectrum analyzer in silicon

Seong-Ho Kong, Reinoud F. Wolffenbuttel. Spectral performance of a micromachined infrared spectrum analyzer in silicon. IEEE T. Instrumentation and Measurement, 54(1):264-267, 2005. [doi]

Authors

Seong-Ho Kong

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Reinoud F. Wolffenbuttel

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