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x dielectric films used in RF MEMS capacitive switches

Matroni Koutsoureli, Loukas Michalas, E. Papandreou, George J. Papaioannou. x dielectric films used in RF MEMS capacitive switches. Microelectronics Reliability, 55(9-10):1911-1915, 2015. [doi]

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Matroni Koutsoureli

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Loukas Michalas

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E. Papandreou

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George J. Papaioannou

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