Determination of bulk discharge current in the dielectric film of MEMS capacitive switches

M. Koutsoureli, G. J. Papaioannou. Determination of bulk discharge current in the dielectric film of MEMS capacitive switches. Microelectronics Reliability, 51(9-11):1874-1877, 2011. [doi]

Authors

M. Koutsoureli

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G. J. Papaioannou

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