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The classification algorithm development of photomasks defects based on fuzzy logic

Yuliya Kozina, Nataliya Gulyaeva. The classification algorithm development of photomasks defects based on fuzzy logic. In First International Conference on Data Stream Mining & Processing, DSMP 2016, Lviv, Ukraine, August 23-27, 2016. pages 373-376, IEEE, 2016. [doi]

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Yuliya Kozina

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Nataliya Gulyaeva

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