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Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

K. Kozuka, Dong F. Wang, Tsuyoshi Ikehara, Keisuke Chatani, Ryutaro Maeda. Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1198-1201, IEEE, 2013. [doi]

Authors

K. Kozuka

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Dong F. Wang

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Tsuyoshi Ikehara

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Keisuke Chatani

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Ryutaro Maeda

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