Hung-Fei Kuo, Anifatul Faricha. Artificial Neural Network for Diffraction Based Overlay Measurement. IEEE Access, 4:7479-7486, 2016. [doi]
@article{KuoF16,
title = {Artificial Neural Network for Diffraction Based Overlay Measurement},
author = {Hung-Fei Kuo and Anifatul Faricha},
year = {2016},
doi = {10.1109/ACCESS.2016.2618350},
url = {http://dx.doi.org/10.1109/ACCESS.2016.2618350},
researchr = {https://researchr.org/publication/KuoF16},
cites = {0},
citedby = {0},
journal = {IEEE Access},
volume = {4},
pages = {7479-7486},
}