Effect of fin shape of tapered FinFETs on the device performance in 5-nm node CMOS technology

Erry Dwi Kurniawan, Hao Yang, Chia-Chou Lin, Yung-Chun Wu. Effect of fin shape of tapered FinFETs on the device performance in 5-nm node CMOS technology. Microelectronics Reliability, 83:254-259, 2018. [doi]

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