Designs for improving the performance of an electro-thermal in-plane actuator

Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying Khai Teh, Ying Fei Teh, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata. Designs for improving the performance of an electro-thermal in-plane actuator. In IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, Kowloon, Hong Kong, China, October 3-5, 2011. pages 220-225, IEEE, 2011. [doi]

Authors

Alex Man Ho Kwan

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Sichao Song

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Xing Lu

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Lei Lu

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Ying Khai Teh

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Ying Fei Teh

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Eddie Wing Cheung Chong

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Yan Gao

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William Hau

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Fan Zeng

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Man Wong

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Chunmei Huang

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Akira Taniyama

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Yoshihide Makino

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So Nishino

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Toshiyuki Tsuchiya

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Osamu Tabata

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