External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Equipment Condition-Integrated Predictive Modeling for Optimized Scheduling of Ion Implantation in Semiconductor Manufacturing

Andreas Laber, Martin Gebser, Konstantin Schekotihin. Equipment Condition-Integrated Predictive Modeling for Optimized Scheduling of Ion Implantation in Semiconductor Manufacturing. In Ulle Endriss, Francisco S. Melo, Kerstin Bach, Alberto José Bugarín Diz, Jose Maria Alonso-Moral, Senén Barro, Fredrik Heintz, editors, ECAI 2024 - 27th European Conference on Artificial Intelligence, 19-24 October 2024, Santiago de Compostela, Spain - Including 13th Conference on Prestigious Applications of Intelligent Systems (PAIS 2024). Volume 392 of Frontiers in Artificial Intelligence and Applications, pages 4508-4515, IOS Press, 2024. [doi]

Authors

Andreas Laber

This author has not been identified. Look up 'Andreas Laber' in Google

Martin Gebser

This author has not been identified. Look up 'Martin Gebser' in Google

Konstantin Schekotihin

This author has not been identified. Look up 'Konstantin Schekotihin' in Google
runs on