Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure - researchr publication authors

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Tibor Lalinsky, M. Krnac, S. Hascik, Z. Mozolova, L. Matay, I. Kostic, P. Hrkut, Jiri Jakovenko, Miroslav Husak. Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure. International Journal of Computational Engineering Science, 4(3):543-546, 2003. [doi]

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