Using Genetic Algorithms with Local Search for Thin Film Metrology

Mark Land, John J. SIDorowich, Richard K. Belew. Using Genetic Algorithms with Local Search for Thin Film Metrology. In Thomas Bäck, editor, Proceedings of the 7th International Conference on Genetic Algorithms, East Lansing, MI, USA, July 19-23, 1997. pages 537-544, Morgan Kaufmann, 1997.

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