Local thickness and composition analysis of TEM lamellae in the FIB

Christian Lang, Matthew Hiscock, Michael Dawson, Cheryl Hartfield. Local thickness and composition analysis of TEM lamellae in the FIB. Microelectronics Reliability, 54(9-10):1790-1793, 2014. [doi]

@article{LangHDH14,
  title = {Local thickness and composition analysis of TEM lamellae in the FIB},
  author = {Christian Lang and Matthew Hiscock and Michael Dawson and Cheryl Hartfield},
  year = {2014},
  doi = {10.1016/j.microrel.2014.07.043},
  url = {http://dx.doi.org/10.1016/j.microrel.2014.07.043},
  researchr = {https://researchr.org/publication/LangHDH14},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {54},
  number = {9-10},
  pages = {1790-1793},
}