Fabrication of micro-sensors based on a parylene thin-film substrate for monitoring proton exchange membrane fuel cells - researchr publication authors

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Chi-Yuan Lee, Chienliu Chang, Pin-Cheng Chan, Ren-De Huang, Maing-Sao Tong. Fabrication of micro-sensors based on a parylene thin-film substrate for monitoring proton exchange membrane fuel cells. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 102-105, IEEE, 2010. [doi]

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