Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing

Seung Kyung Lee, Pilsung Kang, Sungzoon Cho. Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing. Neurocomputing, 131:427-439, 2014. [doi]

@article{LeeKC14,
  title = {Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing},
  author = {Seung Kyung Lee and Pilsung Kang and Sungzoon Cho},
  year = {2014},
  doi = {10.1016/j.neucom.2013.10.001},
  url = {http://dx.doi.org/10.1016/j.neucom.2013.10.001},
  researchr = {https://researchr.org/publication/LeeKC14},
  cites = {0},
  citedby = {0},
  journal = {Neurocomputing},
  volume = {131},
  pages = {427-439},
}