Feature extraction of probe mark image and automatic detection of probing pad defects in semiconductor using CSVM

Jeong-Hoon Lee, Jee-Hyong Lee. Feature extraction of probe mark image and automatic detection of probing pad defects in semiconductor using CSVM. In Antanas Verikas, Branislav Vuksanovic, Petia Radeva, Jianhong Zhou, editors, Seventh International Conference on Machine Vision, ICMV 2014, Milan, Italy, 19-21 November 2014. Volume 9445 of SPIE Proceedings, SPIE, 2014. [doi]

@inproceedings{LeeL14-58,
  title = {Feature extraction of probe mark image and automatic detection of probing pad defects in semiconductor using CSVM},
  author = {Jeong-Hoon Lee and Jee-Hyong Lee},
  year = {2014},
  doi = {10.1117/12.2181518},
  url = {https://doi.org/10.1117/12.2181518},
  researchr = {https://researchr.org/publication/LeeL14-58},
  cites = {0},
  citedby = {0},
  booktitle = {Seventh International Conference on Machine Vision, ICMV 2014, Milan, Italy, 19-21 November 2014},
  editor = {Antanas Verikas and Branislav Vuksanovic and Petia Radeva and Jianhong Zhou},
  volume = {9445},
  series = {SPIE Proceedings},
  publisher = {SPIE},
  isbn = {9781628415605},
}