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High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure

Liang Lei, Bo Dong, Yuxuan Hu, Yisong Lei, Zhizhong Wang, Shuangchen Ruan. High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure. Sensors, 22(17):6479, 2022. [doi]

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