Dongsheng Li, Hanyong Dong, Zihao Xie, Mengjiao Qu, Qian Zhang, Jin Xie. Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1419-1422, IEEE, 2021. [doi]