Solid-based CAPP for surface micromachined MEMS devices - researchr publication related

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Jianhua Li, Shuming Gao, Yusheng Liu. Solid-based CAPP for surface micromachined MEMS devices. Computer-Aided Design, 39(3):190-201, 2007. [doi]

The following publications are possibly variants of this publication:

A Surface Micromachined CMOS MEMS Humidity SensorJian-qiu Huang, Fei Li, Min Zhao, Kai Wang. micromachines, 6(10):1569-1576, 2015. [doi]

Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integrationDanqi Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang, Dacheng Zhang. nems 2014: 513-516 [doi]

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