Periodic-Disturbance Observer Using Spectrum-Selection Filtering Scheme for Cross-Coupling Suppression in Atomic Force Microscopy

Linlin Li, Wei-wei Huang, Xiangyuan Wang, Yuan-Liu Chen, Li-Min Zhu. Periodic-Disturbance Observer Using Spectrum-Selection Filtering Scheme for Cross-Coupling Suppression in Atomic Force Microscopy. IEEE T. Automation Science and Engineering, 20(3):2037-2048, July 2023. [doi]

Authors

Linlin Li

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Wei-wei Huang

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Xiangyuan Wang

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Yuan-Liu Chen

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Li-Min Zhu

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