Temperature control of rapid thermal processing system using adaptive fuzzy network

Chin-Teng Lin, Chia-Feng Juang, Jui-Cheng Huang. Temperature control of rapid thermal processing system using adaptive fuzzy network. Fuzzy Sets and Systems, 103(1):49-65, 1999. [doi]

Authors

Chin-Teng Lin

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Chia-Feng Juang

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Jui-Cheng Huang

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