Non-contact Mode SPM System Design by Integrating MEMS Electro-static Micro-probe & Laser Doppler Interferometer - researchr publication authors

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Jium-Ming Lin, Chun-Chieh Lin. Non-contact Mode SPM System Design by Integrating MEMS Electro-static Micro-probe & Laser Doppler Interferometer. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Taipei, Taiwan, October 8-11, 2006. pages 4591-4596, IEEE, 2006. [doi]

This author has not been identified. Look up 'Jium-Ming Lin' in GoogleThis author has not been identified. Look up 'Chun-Chieh Lin' in Google

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