High-Quality Nanocrystalline Silicon (nc-Si:H) Thin Film With Mixed-Phase and Its Application of Circulating Tumor Cell DEP Biochip

Yu-Ming Lin, Hung-Wei Wu, Jia-Hao Lin, Wei-Chen Tien, Cheng-Yuan Hung, Shoou-Jinn Chang, Ran Liu. High-Quality Nanocrystalline Silicon (nc-Si:H) Thin Film With Mixed-Phase and Its Application of Circulating Tumor Cell DEP Biochip. IEEE Access, 11:16057-16065, 2023. [doi]

Authors

Yu-Ming Lin

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Hung-Wei Wu

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Jia-Hao Lin

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Wei-Chen Tien

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Cheng-Yuan Hung

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Shoou-Jinn Chang

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Ran Liu

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