Louis W. Y. Liu. Fabrication of three dimensional hollow or suspended microstructures. In 2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014. pages 1-5, IEEE, 2014. [doi]
@inproceedings{Liu14-89, title = {Fabrication of three dimensional hollow or suspended microstructures}, author = {Louis W. Y. Liu}, year = {2014}, doi = {10.1109/MHS.2014.7006157}, url = {http://dx.doi.org/10.1109/MHS.2014.7006157}, researchr = {https://researchr.org/publication/Liu14-89}, cites = {0}, citedby = {0}, pages = {1-5}, booktitle = {2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014}, publisher = {IEEE}, isbn = {978-1-4799-6678-3}, }