Hai-Yun Liu. A simple method for determining the coefficients of thermal expansion of polysilicon thin films by using resonance frequency measurements. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
@inproceedings{Liu16-122, title = {A simple method for determining the coefficients of thermal expansion of polysilicon thin films by using resonance frequency measurements}, author = {Hai-Yun Liu}, year = {2016}, doi = {10.1109/ICSENS.2016.7808434}, url = {https://doi.org/10.1109/ICSENS.2016.7808434}, researchr = {https://researchr.org/publication/Liu16-122}, cites = {0}, citedby = {0}, pages = {1-3}, booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016}, publisher = {IEEE}, isbn = {978-1-4799-8287-5}, }