A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing

Kai Liu 0015, Yangquan Chen, Pawel D. Domanski, Xi Zhang 0011. A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing. Algorithms, 11(7):90, 2018. [doi]

Authors

Kai Liu 0015

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Yangquan Chen

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Pawel D. Domanski

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Xi Zhang 0011

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