Accurate and steady control on trajectory tracking for the wafer transfer robot

Yanjie Liu, Yumei Cao, Lining Sun, XiaoFei Zheng. Accurate and steady control on trajectory tracking for the wafer transfer robot. Industrial Robot, 37(6):552-561, 2010. [doi]

@article{LiuCSZ10,
  title = {Accurate and steady control on trajectory tracking for the wafer transfer robot},
  author = {Yanjie Liu and Yumei Cao and Lining Sun and XiaoFei Zheng},
  year = {2010},
  doi = {10.1108/01439911011081704},
  url = {http://dx.doi.org/10.1108/01439911011081704},
  researchr = {https://researchr.org/publication/LiuCSZ10},
  cites = {0},
  citedby = {0},
  journal = {Industrial Robot},
  volume = {37},
  number = {6},
  pages = {552-561},
}