Yanjie Liu, Meng Xu, Yumei Cao. Research, design and experiment of end effector for wafer transfer robot. Industrial Robot, 39(1):79-91, 2012. [doi]
@article{LiuXC12-6,
title = {Research, design and experiment of end effector for wafer transfer robot},
author = {Yanjie Liu and Meng Xu and Yumei Cao},
year = {2012},
doi = {10.1108/01439911211192529},
url = {http://dx.doi.org/10.1108/01439911211192529},
researchr = {https://researchr.org/publication/LiuXC12-6},
cites = {0},
citedby = {0},
journal = {Industrial Robot},
volume = {39},
number = {1},
pages = {79-91},
}