Daniel López, Ricardo S. Decca, Ephraim Fischbach, Dennis E. Krause. MEMS-based force sensor: Design and applications. Bell Labs Technical Journal, 10(3):61-80, 2005. [doi]
@article{LopezDFK05,
title = {MEMS-based force sensor: Design and applications},
author = {Daniel López and Ricardo S. Decca and Ephraim Fischbach and Dennis E. Krause},
year = {2005},
doi = {10.1002/bltj.20104},
url = {http://dx.doi.org/10.1002/bltj.20104},
tags = {design science, rule-based, e-science, design},
researchr = {https://researchr.org/publication/LopezDFK05},
cites = {0},
citedby = {0},
journal = {Bell Labs Technical Journal},
volume = {10},
number = {3},
pages = {61-80},
}