Reduction of the temperature sensitivity of anodic bonded resonant pressure micro sensors - researchr publication authors

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Yulan Lu, Bo Xie, Lin Zhu, Qiuxu Wei, Chaochao He, Chao Xiang, Junbo Wang, Deyong Chen, Jian Chen. Reduction of the temperature sensitivity of anodic bonded resonant pressure micro sensors. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 816-819, IEEE, 2017. [doi]

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