Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang, Jin Yang. Yaw error correction of ultra-precision stage for scanning beam interference lithography systems. J. Systems & Control Engineering, 232(7):869-878, 2018. [doi]
@article{LuYZWZY18,
title = {Yaw error correction of ultra-precision stage for scanning beam interference lithography systems},
author = {Sen Lu and Kaiming Yang and Yu Zhu and Leijie Wang and Ming Zhang and Jin Yang},
year = {2018},
doi = {10.1177/0959651818766197},
url = {https://doi.org/10.1177/0959651818766197},
researchr = {https://researchr.org/publication/LuYZWZY18},
cites = {0},
citedby = {0},
journal = {J. Systems & Control Engineering},
volume = {232},
number = {7},
pages = {869-878},
}