A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure - researchr publication authors

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Yulan Lu, Sen Zhang, Yadong Li, Bo Xie, Deyong Chen, Junbo Wang, Jian Chen. A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 488-491, IEEE, 2019. [doi]

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