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Methodologies for layout decomposition and mask optimization: A systematic review

Yuzhe Ma, Xuan Zeng 0001, Bei Yu. Methodologies for layout decomposition and mask optimization: A systematic review. In 2017 IFIP/IEEE International Conference on Very Large Scale Integration, VLSI-SoC 2017, Abu Dhabi, United Arab Emirates, October 23-25, 2017. pages 1-6, IEEE, 2017. [doi]

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Yuzhe Ma

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Xuan Zeng 0001

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Bei Yu

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