Kashi Vishwanath Machani, Holm Geisler, Dirk Breuer, Frank Kuechenmeister, Jens Paul. Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack using finite element analysis and validation. In IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015. pages 1, IEEE, 2015. [doi]
@inproceedings{MachaniGBKP15,
title = {Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack using finite element analysis and validation},
author = {Kashi Vishwanath Machani and Holm Geisler and Dirk Breuer and Frank Kuechenmeister and Jens Paul},
year = {2015},
doi = {10.1109/IRPS.2015.7112789},
url = {http://dx.doi.org/10.1109/IRPS.2015.7112789},
researchr = {https://researchr.org/publication/MachaniGBKP15},
cites = {0},
citedby = {0},
pages = {1},
booktitle = {IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015},
publisher = {IEEE},
isbn = {978-1-4673-7362-3},
}